Load Port Module For Manual Loading
Source: Brooks Automation
The Brooks Cassette LPM is one of a complete family of interchangeable Load Port Modules
The Brooks Cassette LPM is one of a complete family of interchangeable Load Port Modules (LPMs) offered by Brooks Automation. The Cassette LPM provides an inexpensive interface for manually loading cassettes into BOLTS compatible 200/300mm "bridge" tools. It is particularly useful during process development.
The manual door directs air from the mini-environment across the wafers and protects the wafers from contamination.
Control of the LPM is via parallel IO from the Transport Module Controller or other external CPU. Signals allow determining the wafer size and interlocking the door for human safety.
The LPM requires no adjustments or periodic maintenance. Use of the optional cart with the kinematic mounting bar allows replacement of the unit in less than 15 minutes.
Like all Brooks new products, the Brooks Cassette LPM is CE and S2 compliant.
Brooks Automation, 15 Elizabeth Drive, Chelmsford, MA 01824. Tel: 978-262-2400; Fax: 978-262-2500.
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