Load Lock Wafer Elevators
Featured at Semicon West
Thomson Industries offers both off-the-shelf and custom designed wafer elevators. Thomson's wafer elevators feature a smooth, precision Super Smart Ball Bushing bearing guidance system. The elevator utilizes precision ground, hardened steel shafting that is available in stainless steel or plated for corrosion resistance. The precision preloaded ball screw assembly also can be plated for corrosion resistance. All of the aluminum parts are anodized to ensure long life. Optional stainless steel hardware is available in addition to ball screw leads for choice of speed ranges. Convenient T-slots on the carriage assembly allow for easy mounting of limit switches, shaft rotation devices, and other options.
Other features include:
- Proprietary cartridge sealing mechanism features two seals to facilitate pump down and vacuum retention
- Precision-machined O-Ring equipped flange with optional ISO mounting brackets
- 300 Series stainless steel pusher shaft with a finish of 6-10 RMS
- Preloaded precision ball screw assembly
- Integral electric brake
- Double bag ready for cleanroom
- Optional brushless servo system
- Optional rotational pusher shaft
- Optional stainless steel bellows
- Smooth, stable, sealed preloaded Super Smart Ball Bushing bearing pusher platform
- Pusher shaft repeatability as low as 0.025 mm/300 mm
- Pusher shaft accuracy 0.01 mm
- Life at 100 N, 100,000 Km
Typical applications include wafer processing and inspection, wafer furnaces, robotic wafer arms, transport, and flat panel display processing. Custom assemblies can be quickly prototyped. Designers can integrate the systems into new equipment to save time and reduce cost.
Thomson Industries, Inc., 2 Channel Dr., Port Washington, NY 11050-2214. Contact: Janet Hartley, 516-944-1892 or 516-883-8000; Fax: 516-883-9039.