Liquozon Ozonated Water Delivery Subsystem

Liquozon ozonated water delivery system is the newest offering in the ASTeX family of ozone delivery systems. The Liquozon system is designed to provide a full range of dissolved ozone—from 5 to 90 ppm, the highest concentration of dissolved ozone available on the market. Closed-loop control coupled with an intelligent electrical interface allows delivery of ozonated water at variable flow rates to multiple tools. High purity, ozone-resistant materials and unique doping technique insure ultra clean ozonated water delivery for high purity semiconductor and flat panel applications.

The Liquozon system features the field-proven, patented Semozon ozone generation technology. The system includes monitoring, control (including closed-loop control of dissolved ozone concen-tration) and ozone destruct modules with all necessary plumbing. The Liquozon systems are enclosed in a vented rack, interlocked for safety and are S2-93 and CE compliant.

N/A, 90 Industrial Way, Wilmington, MA 01887. Tel: 978-284-4000; Fax: 978-284-4999.