Liquozon Ozonated Water Delivery Subsystem

Liquozon ozonated water delivery system is the newest offering in the ASTeX family of ozone delivery systems
Liquozon ozonated water delivery system is the newest offering in the ASTeX family of ozone delivery systems. The Liquozon system is designed to provide a full range of dissolved ozone—from 5 to 90 ppm, the highest concentration of dissolved ozone available on the market. Closed-loop control coupled with an intelligent electrical interface allows delivery of ozonated water at variable flow rates to multiple tools. High purity, ozone-resistant materials and unique doping technique insure ultra clean ozonated water delivery for high purity semiconductor and flat panel applications.
The Liquozon system features the field-proven, patented Semozon ozone generation technology. The system includes monitoring, control (including closed-loop control of dissolved ozone concen-tration) and ozone destruct modules with all necessary plumbing. The Liquozon systems are enclosed in a vented rack, interlocked for safety and are S2-93 and CE compliant.
N/A, 90 Industrial Way, Wilmington, MA 01887. Tel: 978-284-4000; Fax: 978-284-4999.