Product/Service

Liquid Mass Flow Controller

Source: Porter Instrument Company, Inc.
The PORTER P2000 Series Liquid Mass Flow Controller is designed to address the need for precise control of liquid precursors in semiconductor manufacturing processes

The PORTER P2000 Series Liquid Mass Flow Controller is designed to address the need for precise control of liquid precursors in semiconductor manufacturing processes. The compact size of the device simplifies system integration. Clean room assembly and all metal seal construction ensure high purity and leak integrity. A measurement system provides high accuracy with less than a 5° C rise in temperature. Control circuitry combined with piezoelectric-actuated control valve creates the fast response necessary for single wafer processing.

Design Features

  • Piezoelectric Control Valve
  • Metal Seal Construction
  • 1/8in VCR Connections
  • Compact Size
  • Fast Response
  • 316L /316 SS Construction
  • +/- 1% F.S. Accuracy Including Linearity and Repeatability

    Porter Instrument Company, Inc., 245 Township Line Road, Hatfield, PA 19440-0907. Tel: 215-723-4000; Fax: 215-723-2199.