Liquid Delivery System

At SEMICON Southwest '99, Air Products and Chemicals, Inc. offers its new low pressure, high volume Gasguard(R) BSGS Liquid Delivery System using ISO modules. It was designed as a safe, economical and self-sufficient delivery option for the supply of trichlorosilane (TCS) and silicon tetrachloride (SiCl4) into electronics fabrication facilities.

TCS is used as a silicon source in wafer epitaxial processing, the practice of creating a layer of single crystal silicon on a wafer that has the same crystal orientation as the wafer, but a different doping type. SiCl4 is used in fiber optic applications.

Typically, TCS and SiCl4 and other bulk specialty products are delivered to a facility via 55-gallon drums or stationary tanks. Air Products' new Gasguard BSGS Liquid Delivery System may be used to supply liquid TCS or SiCl4 from these traditional sources or alternatively, via ISO modules (up to 40,000 pound containers), thereby eliminating safety and quality risks associated with transfill to traditional tank installations. The supply system consists of a mechanical enclosure-which houses all valving, piping, monitoring and liquid containment necessary to deliver product from the liquid container-as well as an electrical enclosure, which features a programmable logic controller and operator interface terminal with multi-graphic displays.

Air Products and Chemicals, Inc., 7201 Hamilton Blvd., Allentown, PA 18195-1501. Tel: (610) 481-4911. Fax: (610) 481-5900.