Datasheet | January 30, 2012

LifeAssure™ PSN Series Datasheet

Source: 3M Purification Inc.

LifeASSURE™ PSN series nylon filter cartridges are highly retentive membrane filter elements designed to meet the exacting requirements of photoresist and ancillary chemical applications. Utilizing 3M Purification Inc. Advanced Pleat Technology (APT), LifeASSURE PSN series nylon filter cartridges provide maximum flow rates with minimal pressure drop, which benefits recirculation time. By increasing the rate of recirculation, particle specifications are achieved more rapidly, throughput is maximized, and cost of ownership is lowered.

The naturally hydrophilic Nylon 6,6 pleated membrane in an all high density polyethylene (HDPE) construction, provides low extractables, increased filter life, and superior reduction of gel and hard particles when compared to other membrane cartridges. LifeASSURE PSN series nylon filter cartridges are ideally suited for photoresist and ancillary chemical applications where high efficiency contaminant reduction at 0.04 µm, 0.1 µm, or 0.2 µm is required.

A small amount of gel particles can normally be found in photoresists. These gels can form during the manufacturing and storage of photoresists. Their reduction from photoresists is highly dependent on differential pressure across the filtration system. Since these gels are deformable, they can extrude through a filter at high differential pressures. At low differential pressures, the forces that would deform gels are correspondingly lower and the gels are retained by the membrane media. 3M Purification Inc. has been able to maximize filtration surface area, which provides both a low inlet pressure to the pump, and low differential pressure, which is optimal for gel reduction. The increase in filtration surface area is achieved by using Advanced Pleat Technology.

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