Laser Scan Micrometer

Technology advancements in the LS-5000 Series Laser Scan Micrometer include 0.05 µm resolution, twice that of conventional systems and a 1200 cps scan frequency, three times higher than other laser scan systems.

Features:

• Visible laser beam for fast setup and alignment
• High-speed sampling at 1200 scans/sec
• Up to 4 sets of scan heads with 4 channel operation and simultaneous monitoring of all 4 channels
• Large touch screen- menu driven user interface with user friendly software
• IP-64 (NEMA 4) rating for production environments
• Full range of measurement functions
• Plug-in boards for quick, easy system expansion

The controller processes data from up to 4 sets (transmitter/receiver_ of scan heads. A unique touch-screen, menu-driven user interface simplifies the setup of system operating parameters. A Help facility guides the user through setup and operation.

During operation, a semiconductor laser in the transmitter head projects a beam onto a 12-sided, rotating cylindrical mirror causing the beam to sweep back and forth. The sweeping beam is reflected through a collimating lens which parallelizes the beam, creating a "curtain" or band of light. Any object in its path reduces the quantity of light entering the receiving sensor head- which then creates a signal proportional to the light quantity.

Production applications include the measurement of object height on up to 4 separate production or assembly lines, the measurement of sheet and thin film thickness- not only to monitor and control sheet thickness but to ensure against multiple sheet stacking during the manufacturing process, the measurement of gaps between rollers, and he measurement of IC pin pitch (distance between pins) during the semiconductor manufacturing process.

Keyence Corporation of America, 50 Tice Blvd., Woodcliff Lake, NJ 07675. Tel: 888-539-3623. Fax: 201-930-1883.