Laser Probe System for Flip Chips

Schlumberger Semiconductor Solutions500 is a precision timing measurement tool for design verification and failure analysis of leading-edge flip-chip packaged ICs. The system uses PID (Phase Interforemeter Detector) technology to speed access to critical waveforms that designers and product development engineers need to de-bug new high-end flip-chip logic devices.

The tool speeds the analysis of first silicon by combining faster acquisition time and greater signal strength with the proprietary PID, which adjusts the laser scanning microscope (LSM) and makes it easier to use. PID uses a `reference beam" and a probe beam to measure the interference between the two reflected signals. This phase interference method significantly improves responsiveness and accuracy by taking advantage of measurement physics and increasing the overall number of waveforms per hour the tool can provide.

Able to probe through 150 microns of silicon on 0.18-micron IC design rules, the new probe system provides less than 80ps rise time/fall time measurements and offers optional cooling for up to 130W parts.

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