Laser Height Sensor

A CCD non-contact laser height sensor for the Millennium Series M-2000 system has been introduced. This height sensor provides high-speed dispense height measurement for delicate substrates, hybrids, and integrated circuits that may be compromised by tactile sensing. In addition, non-contact height sensing eliminates concerns regarding flex, vibration, and substrate contamination.

The laser height sensor's high-speed light-processing capability accommodates wide variations in substrate finish, including rough, dark, and mirrored surfaces, for enhanced throughput and greater yield. The system's high-resolution CCD sensing element is also insensitive to stray light or beam reflections from nearby objects.

The specialized automated circuitry to control the duration of laser emission prevents errors of measurement due to surface color variations. This is also complimented by the auto gain function, which adjusts amplification of the received light, based on target reflectivity. Seamlessly integrated, these features provide stable measurement on substrates ranging from highly reflective silicon dies to matte oxide finishes.

Asymtek, 2762 Loker Avenue West, Carlsbad, CA 92008. Tel: 760-431-1919; Fax: 760-431-2678.