Lam Research Corporation Receives Best Product Award for 2300 Versys™ Silicon Etch System

Award honors industry's top products for superior production performance and significant contributions to semiconductor manufacturing.

Lam Research Corporation (Nasdaq: LRCX), Fremont, Calif., today announced receiving Semiconductor International's Editors' Choice Best Product Award for its 2300 Versys silicon etch system. This award is based on customer nominations and honors the industry's top products for superior production performance and contributions to semiconductor manufacturing. The award was presented to Lam on November 9.

The 2300 Versys silicon etch system employs Lam's industry-leading Transformer Coupled Plasma™ technology and Clean Mode™ operation, which eliminates memory effects for repeatable processing. It is employed in all 200 mm and 300 mm silicon etch applications, including sub-100 nm processes.

We're honored to receive this prestigious award," stated Nick Bright, vice president of global products, "and believe several factors led to this distinction. Leveraging proven etch technology on our unique 200/300 mm platform allowed numerous production successes, including achieving 300 mm process scaling of complicated processes and significant yield improvements and process stability at start-up. The platform's advanced diagnostics capability enables advanced process control and e-diagnostics, while plug and play sensor capability eases integration of future technologies to advance semiconductor manufacturing."

Lam Research Corporation, 4650 Cushing Parkway, Fremont, CA 94538. Tel: 510-659-0200; Fax: 510-572-6465.