Klarity ACE Yield Correlation and Analysis Software

KLA-Tencor Corp. today introduced Klarity ACE 5.5, the latest version of its Klarity ACE yield correlation and analysis software. cobtained during all stages of integrated circuit (IC) development and production in one-third the time required with competing yield analysis tools. As a result, customers can accurately determine the source of defects and process excursions, and quickly correct them—speeding their ramp to higher device yields. Since its introduction 18 months ago, Klarity ACE has been adopted by leading integrated device manufacturers and foundries across 28 fabs, as well as by 28 fabless design companies and test houses.

As semiconductor manufacturing costs continue to rise, yield management has become increasingly vital in helping chipmakers to accelerate the ramp of new processes and technologies into production in order to remain competitive and meet their profit margins. Finding defects and process errors during production is an important step in maximizing yield. Of equal importance, however, is finding the source of these yield problems so that corrective action can be taken quickly to optimize the processes. This is especially true for foundries, which implement many processes and chip designs into production. By incorporating Klarity ACE in their fab network, chipmakers can identify the type and source of these defect and process errors, and prevent them from impacting their bottom line.

Klarity ACE integrates all yield- and process-related data from IC fabs, foundries, wafer and photomask manufacturers, and IC design houses into a centralized database, and provides low-yielding-lot, split-lot and wafer-yield-spatial analysis. These capabilities enable users to clearly identify the relationships between in-line data, such as gate critical dimensions (CDs), and test data, such as speed bin, to more rapidly identify and resolve specific process problems that impact device yield, performance and reliability. Klarity ACE is particularly beneficial to foundries and fabless semiconductor companies because it allows fabless, in-house design engineers to share data with fab engineers via the Internet—enabling quick resolution of yield problems at all stages of IC development and fabrication.

Klarity ACE 5.5—the latest version of KLA-Tencor's yield analysis software—incorporates several new features that dramatically improve ease of use and reduce analysis time by more than 30 percent. It can differentiate between random and systematic yield problems, providing users with the data they need in order to take appropriate corrective measures. Its new spatial and equipment sensitivity features facilitate analysis across multiple wafer lots and help users to more quickly identify the source of a yield problem. With Klarity ACE 5.5, users can also schedule yield analysis in advance so that data from specific wafer lots can be analyzed automatically without requiring the wafers to be manually taken offline.

Klarity ACE 5.5 is currently available. Customers can contact their local sales representatives to find out how they can upgrade previous versions of Klarity ACE to Klarity ACE 5.5.

KLA-Tencor Instruments, 160 Rio Robles, San Jose, CA 95134. Tel: 408-875-4200; Fax: 408-434-4270.