Jalapeño Series Heated Vacuum Valves Brochure

A 16-page brochure on the Jalapeño series heated vacuum valves includes applications, a technical overview, specifications, dimensions, part numbers, and pricing. The poppet-style vacuum valves will reach a minimum temperature of 150°C

The valves are designed to be used in processes like low-pressure chemical vapor deposition where production byproducts can condense and build up. The build up would interfere with the operation of conventional valves. By heating the valve, the internal temperature is elevated, leaving the byproducts in a gaseous form. The valves are available in angle and inline models with seal, limit switch, and solenoid options.

The cleanroom-compatible jackets are made from materials that heat the components on the inside, but on the outside the jacket is warm to the touch. A series of safeguards are built in, such as low temperature alert, which allows for ease of monitoring the correct operation. A built-in thermostat eliminates the need for an external controller. A thermal fuse in all heaters is standard.

MKS Instruments, Vacuum Products Group, 5330 Sterling Dr., Boulder, CO 80301. Tel: 800-345-1967; Fax: 303-442-6880.