Product/Service

IonPro-IMS

Source: Molecular Analytics

IonPro-IMS is for the PPB to PPM detection of airborne contaminants such as total amines and acids, ammonia, and n-Methyl pyrrolidone

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IonPro-IMS is for the PPB to PPM detection of airborne contaminants such as total amines and acids, ammonia, and n-Methyl pyrrolidone. The analyzer has been designed for use in DUV lithography to improve resist uniformity, guarantee maximum filter life, and reduce process downtime.

The IonPro-IMS incorporates Ion Mobility Spectrometry (IMS) technology with an internal four channel multi-port sampling system for easy monitoring in an around a DUV track and stepper. The IMS cell can be turned for either single or multiple compound stepper. The IMS cell can be tuned for either a single or multiple compound monitoring.

The system is designed for long-term, continuous, unattended air monitoring. The electronics are solid state and there are no moving parts or optics that require alignment. It is UL, CE, and CSA certified. The system is equipped with an optional SECS/GEM communication package.

Molecular Analytics LLC, 25 Loveton Circle, P.O. Box 1123, Sparks, MD 21152-1123. Tel: 800-635-4598 or 410-472-2146; Fax: 410-472-2156.