Product/Service

Ion Gauge

Source: Pfeiffer Vacuum, Inc.
The IMR 260 Process Ion Gauge for vacuum deposition processes combines hot cathode ionization and Pirani gauge in one housing, with an expanded measuring range to 10-61000 mbar
Pfeiffer Vacuum, Inc. Process Ion Gauge for vacuum deposition processes combines hot cathode ionization and Pirani gauge in one housing, with an expanded measuring range to 10-61000 mbar. The Pirani gauge signals the on-board electronics, which acts as the controller for the hot filament, sending it a signal when to turn on or off, virtually eliminating filament burnout. When a filament needs to be changed, an easy to replace spare cartridge is available.

The ion gauge has reproducibility of +/- 2% from 10 to 0.1 mbar, covering the whole range of sputtering and reactive evaporation processes. The gauge integrates electronics into the gauge head, making it suitable for use with any computer controlled vacuum system and eliminates the need for a separate gauge controller. It is available with DN 16, 25 or 40 ISO-KF or CF flanges.

The ion gauge is part of a family of Balzers Instruments gauges that includes the Piezo, capacitance, Pirani and cold cathode as well as the FullRange gauge that combines two gauges in one compact housing to measure from atmosphere to UHV.

<%=company%>, 24 Trafalgar Square, Nashua, NH 03063-1988. Tel: 603-578-6500. Fax: 603-578-6550.