Interactive On-line Customer Support

KLA-TencorCorp. has introduced iSupport, an on-line customer support offering that enables KLA-Tencor's technical support and applications engineers to remotely access data from KLA-Tencortools and operate them in real time to diagnose and rapidly resolve problems when they occur. iSupport provides continuous tool monitoring and reporting, as well as automated early detection of system problems, at the customer site.

Data collected from iSupport is placed in the integrated diagnostic monitoring (iDM) server, which KLA-Tencorinstalls directly in the customer's fab. This intelligent server continuously monitors tools that are connected to iSupport and alerts both the customer and KLA-Tencorwhen a problem is detected. The iDM server also functions as the administrative gatekeeper for KLA-Tencor's On-line Support Center (OSC) by preventing unauthorized access to the tool.

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