Product/Service

Integrated Low-K Solution For Copper Chips

Source: Novellus Systems Inc.
The Coral family of carbon-doped oxide films have dielectric constants ranging from 3.3 to less than 2.5
Novellus Systems Inc.ia Novellus' production-proven SEQUEL Express platform, the CORAL family of carbon-doped oxide films have dielectric constants ranging from 3.3 to less than 2.5. The films can be integrated with dielectric etch, metal deposition and chemical mechanical polishing (CMP) processes. Novellus has also developed a variety of dielectric barriers and etch stops for low-k films.

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