Innovative Z-series Wet Cleaning Systems - UW200Z (FEOL)
The UW200Z is a state-of-the-art wet cleaning tool dedicated to FEOL surface preparations such as Pre-Gate Oxidation Clean, Pre-Metal Clean and Post-Ash Clean. It has the smallest footprint of all TEL wet cleaning tools, and has a higher throughput associated with advanced new dryer SD2. The UW200Z can be used for O3- a cleaning alternative to SPM / SOM, and One- Pass multi-chemical injection for diluted chemical process, and conventional chemical circulation application.
TEL is a leading supplier of Cassetteless wet cleaning systems. The UW200Z is based on this philosophy, which brings many benefits such as small bath volume, high rinse efficiency, and no cross-contamination via cassette. Other advanced features offered by the UW200Z include Standardized Module Configuration and Narrow Pitch Batch Formation.
Tokyo Electron America, Inc., 2400 Grove Blvd., Austin, TX 78741. Tel: 512-424-1000; Fax: 512-424-1034.