In-Situ Endpoint Control System
Source: Luxtron Corporation
The OPTIMA 9000 Series Model 9825 for wet etch processes used in TFT Flat Panel Display manufacture
Luxtron CorporationPTIMA 9000 Series Model 9825 for wet etch processes used in TFT Flat Panel Display manufacture. Applications for this product include Metal (Al, Cr), ITO, and Dielectric (SiN, SiO) Etch.
Using principles of reflectometry and interferometry, the system features sensitivity to detect change in optical film properties as the panel is etched.
The system uses up to 8 reflectance sensors, designed of overhead viewing, to independently monitor the panel as it is processed. Using proprietary signal processing algorithms, the generated signal is filtered and analyzed to detect process endpoint. Data recorded by the Real Time endpoint Controller can be stored for further statistical and quality control analysis.
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