Product/Service

In-Line Gas Purifiers

In-Line Gas Purifiers
The Waferpure Megaline in-line gas purifiers are designed to remove particles, moisture, oxygen, CO2, CO and other gas-specific impurities from process gas streams
N/Aerpure Megaline in-line gas purifiers are designed to remove particles, moisture, oxygen, CO2, CO and other gas-specific impurities from process gas streams. These purifiers eliminate variation in cylinder gas purity and protect the downstream gas distribution network. These purifiers are suitable for applications in gas cabinets, in valve manifold boxes, and for weld gases.

Features:

  • Flow rate up to 50 slpm
  • Operating temperature - 100 °C for hydrogen bromide, chloride, silane, oxygen and inert gases, 50 °C for hydride, nitrous oxide and sulfur hexafluoride gases
  • Leak rate - 1x 10-9 atm·cc/sec
  • Housing rated pressure - 52 bar (750 psig) at 23 °C
  • Differential Pressure - 7 bar (100 psi) at 23 °C

    • <%=company%>, 80 Ashby Road, Bedford, MA 01730. Tel: 800-MILLIPORE. Fax: 800-MILLIFX.