Ibis 1000
Source: Ibis Technology
The Ibis 1000 oxygen implanter is a fully automated system that maintains the highest levels of process consistency
The Ibis 1000 oxygen implanter is a fully automated system that maintains the highest levels of process consistency. The machine can process 4", 6", and 8" wafers. Features of the Ibis 1000 include vacuum load lock, high quality wafers, up to 8" wafers, automation & robotics, high consistency throughput and product
Ibis Technology, 32 Cherry Hill Drive, Danvers, MA 01923. Tel: 978-777-4247; Fax: 978-777-6570.