HPQ2-S Residual Gas Analyzer

MKS Spectra Products has announced HPQ2-S - a higher-pressure version of its existing HPQ2 Residual Gas Analyzer is itself designed to operate at higher pressures than conventional RGA's.

Optimized for operating pressures from 1 to 8 milliTorr, HPQ2-S integrates a high quality ion gauge and vacuum chamber with a high performance miniature quadrupole analyzer. The gauge is powered, controlled and monitored directly by the HPQ2-S and requires no additional components.

Process Eye 1.64, a Windows NT - based software package, provides the HPQ2-S system control, data acquisition, and data display. Special features in the software compensate for high-pressure effects such as pressure non-linearity, as well as pressure dependencies of gas-specific sensitivities.

As with all MKS Spectra Products systems, the HPQ2-S is backed by MKS's Application Support Group, which remains with the customer after initial startup to ensure maximum return on investment.

N/A, 380 Woodview Ave, Morgan Hill, CA 95037. Tel: 408-778-6060 or 800-VAC-CHECK; Fax: 408-776-8575.