High-Speed Wafer Track
Source: B.L.E. Laboratory Equipment
The Acrobat high-speed linear photolithographic processing track is a fully configurable, high-speed wafer track capable of stand-alone operation or directly interfacing with a stepper
B.L.E. Laboratory Equipmentemicon Europa
The Acrobat high-speed linear photolithographic processing track is a fully configurable, high-speed wafer track capable of stand-alone operation or directly interfacing with a stepper.
The system includes a gentle but fast central wafer/substrate handling system, with features such as a self-centering, dual wafer, vacuumless gripper unit, capable of handling wafers 5in. to 8in. in diameter. The design reduces particle contamination and potential metal ion migration from standard robot paddles.
<%=company%>, Herrenlandstrasse 58, D-78315 Radolfzell, Germany, Tel: 49-(0) 77-32-99-19-0, Fax: 49-(0) 77-32-99-19-11