High-Speed Defect Review Scanning Electron Microscope

Applied Materials, Inc. has introduced the SEMVision DR-SEM system, a fully-automated defect review and classification scanning electron microscope specifically designed for in-line operation on advanced semiconductor production lines. The system uses several SEM imaging and material analysis techniques to improve chipmakers' yield earning cycles during fab ramp-up and enable tighter yield control in volume production.

The system features Multiple-Perspective SEM Imaging (MPSI) technology that provides chipmakers with more information for accurately classifying and analyzing defect types than current SEM or optical imaging techniques. By enhancing both the topographic and material characteristics of defects, MPSI technology has enabled the development of an automatic defect classification (ADC) concept that classifies defects into types that are closely linked to the defects' source.

The SEMVision system operates as an easy-to-use engineering tool for defect source identification and process development/equipment characterization. For these applications, features such as tilt, rotation and EDX (Energy Dispersive X-ray) spectroscopy are available. The EDX option provides defect material analysis in less than 20 seconds at a non-destructive SEM beam condition of 5keV with automated element and material identification capabilities.

The increasing difficulty of using existing optical technology to review defects on sub-0.25 micron devices is expected to drive a shift toward in-line DR-SEM technology to enhance device yield. The recently published National Technology Roadmap for Semiconductors, which is a 15-year projection of technology requirements issued by the Semiconductor Industry Association, identified SEM-based automatic defect classification (ADC) as a critical technology for maintaining high yield in devices using 0.18 micron and smaller geometries.

Applied Materials, Inc., 3050 Bowers Avenue, Santa Clara, CA 95054-3299. Tel: 408-727-5555; Fax: 408-748-5119.