High Purity Mass Flow Controllers/Meters
Source: Kinetics
MultiFlo™ option for superior performance,reduced inventory and in-situ support
KineticstiFlo™ option for superior performance,reduced inventory and in-situ support
>Advanced design using proven technology for high performance required for next generation semiconductor applications
>Best performance and reliability in the industry
>Popular reduced cost, semiconductor grade metal seal flow controller
>Available with analog, EIA-485,DeviceNet™ or Profibus interfaces features at a glance
>All gases
>High purity 1µµ inch Ra standard (10µ inch Ra optional)
> Sealed with high leak integrity metal seals producing a leak integrity of 1x10-10 Atm-cc/sec (He)
>Higher reliability-MTBF of 360,000 hours (Model 1660) and 500,000 hours (Model 1661/1665) and ultra-low drift of less than 0.6% per year to reduce year-to-year maintenance, increase uptime and reduce cost-of-ownership
>Better than 0.15% full scale repeatability to provide the same quality run after run
>Statistically verified accuracy. Allows you to easily replicate processes from tool-to-tool and fab-to-fab and to use a single MFC over a wider range of flows
>Minimized dead space for increased accuracy and faster response time under all turn-on conditions
>Valve designed with fewer parts to enhance speed, responsiveness and long-term reliability
>Designed to meet the SEMI standard for Sensor Actuator Network Communications for DeviceNet (SEMI #E54-97). Model 1665 is specifically designed for full ODVA compliance.
>All performance tests per SEMI test methods
>3 year warranty
>Advanced design using proven technology for high performance required for next generation semiconductor applications
>Best performance and reliability in the industry
>Popular reduced cost, semiconductor grade metal seal flow controller
>Available with analog, EIA-485,DeviceNet™ or Profibus interfaces features at a glance
>All gases
>High purity 1µµ inch Ra standard (10µ inch Ra optional)
> Sealed with high leak integrity metal seals producing a leak integrity of 1x10-10 Atm-cc/sec (He)
>Higher reliability-MTBF of 360,000 hours (Model 1660) and 500,000 hours (Model 1661/1665) and ultra-low drift of less than 0.6% per year to reduce year-to-year maintenance, increase uptime and reduce cost-of-ownership
>Better than 0.15% full scale repeatability to provide the same quality run after run
>Statistically verified accuracy. Allows you to easily replicate processes from tool-to-tool and fab-to-fab and to use a single MFC over a wider range of flows
>Minimized dead space for increased accuracy and faster response time under all turn-on conditions
>Valve designed with fewer parts to enhance speed, responsiveness and long-term reliability
>Designed to meet the SEMI standard for Sensor Actuator Network Communications for DeviceNet (SEMI #E54-97). Model 1665 is specifically designed for full ODVA compliance.
>All performance tests per SEMI test methods
>3 year warranty
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