Product/Service

High-Precision Translation Stages

Source: PI (Physik Instrumente) LP
The company offers the M-500 Active Drive High-Precision Translation Stages with integrated linear encoders and servo power amplifiers.
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The company offers the M-500 Active Drive High-Precision Translation Stages with integrated linear encoders and servo power amplifiers.

The stages are designed to meet demanding positioning requirements in metrology, automation, semiconductor and disk drive test equipment etc. They feature closed loop DC motors, travel ranges of 4, 8 and 12 in. and load capacity of 100 kg.

Application examples: Quality control, semiconductor test equipment, metrology, disk drive test set-ups, R&D.

Highlights:

  • Integrated 0.1 µm resolution linear encoders
  • Novel Active Motor Drive (integrated High Efficiency DC-Servo-amlifier) for optimum dynamic performance and reduced cost (no external amplifier required)
  • Velocity up to 200 mm/sec
  • Recirculating ball bearings (no cage migration)
  • Recirculating ballscrew
  • Integrated hall-effect origin switches
  • Integrated hall-effect limit switches
  • Optional motor brake

M-500 stages combine a functional flat design to allow multiaxis combinations and feature a precision machined base from high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision ground recirculating ballscrews with preloaded nuts provide low friction, backlash free positioning. The company also offers a line of DC-Servo Motor Controllers.

Physik Instrumente (PI) GmbH & Co., Polytec Pl. 1-7, 76337 Waldbronn, Germany. Tel: +49 (7243) 604-100. Fax: +49 (7243) 604-145.