High Performance Mass Flow Controllers/Meters

KineticstiFlo™ features for superior performance, reduced inventory and in-situ support
>Advanced design using the proven technologies from popular metal-seal 1660 model to provide high performance required for next generation semiconductor applications
>Best performance and reliability in the industry
>Low cost semiconductor-grade flow controller
>Available with analog, EIA-485,DeviceNet™ or Profibus interfaces

features at a glance
>For non-corrosive and non-ultraclean process gas applications (32µ inch Ra finish)
>Drop-in replacement for any elastomeric MFC
>Sealed with an elastomeric O-ring, which is inexpensive, well characterized, forgiving of surface finish and offers reliable re-sealing
>Easy configuration change and maintenance
>Higher reliability-MTBF of 320,000 hours and ultra-low drift of less than 0.6% per year to reduce year-to-year maintenance and increase uptime
>Better than 0.15% F.S. repeatability to provide the same quality run-after-run
>Statistically verified accuracy. Allows you to easily replicate processes from tool-to-tool and fab-to-fab and to use a single MFC over a wide range of flows
>Minimized dead space for increased accuracy and faster response time under all turn-on conditions
>Valve designed with fewer parts to enhance speed, responsiveness and long-term reliability
>Upstream pressure buffering available for applications with fluctuating inlet pressures
>Compliant with the SEMI standard for Sensor Actuator Network Communications for DeviceNet (SEMI Std. Doc. #2602). Model 8105 specifically designed for full ODVA/SEMI compliance.
>All performance tests per SEMI test methods
>2 year warranty

<%=company%>, 22600 Savi Ranch Pkwy, Yorba Linda, California 92687, Phone: 714-921-2640, Fax: 714-921-0804