Product/Service

High Flow Ultrafiltration Module

Microza ultrafiltration module, the High Flow OLT series, utilizes a hollow fiber membrane with a 6,000 molecular weight cut-off rating to provide high flow filtration for high purity deionized (DI) water used in semiconductor manufacturing
N/A ultrafiltration module, the High Flow OLT series, utilizes a hollow fiber membrane with a 6,000 molecular weight cut-off rating to provide high flow filtration for high purity deionized (DI) water used in semiconductor manufacturing. This module, in a six-inch diameter housing, provides a clean permeate flux of 70 gpm.

This ultrafiltration module features hollow fiber membranes that have a tight, uniformly smooth skin on both the inside and outside of the fibers, helping to assure contaminant removal. When the module is in use, feed water flows from the outside to the inside of the hollow fibers. This flow path produces clean water and eliminates stagnant areas on the permeate side of the membranes. Both the membrane and housing of the module are constructed of polysulfone, contributing to the module's resistance to high temperatures.

This module is designed for use with DI water systems, frequently used throughout the semiconductor manufacturing process. Suitable systems are those with a TOC less than 20 ppb with a feed containing a maximum of 100 particles per milliliter greater than 0.1 µm, and a maximum of 20 particles per milliliter greater than 0.2 µm.

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