H112 Programmable Motorized Stage

Featured at Semicon West

A programmable motorized stage from Prior Scientific provides a full 302mm x 302mm travel and is provided with all fittings for Leica, Nikon, Olympus, or Zeiss semiconductor microscopes. The H112 has been designed for inspection of semiconductor wafers, flat panel displays, and wafer masks. It easily accommodates 300mm wafers and works with many robot arm wafer loaders. The H112 can also be used for transmitted light applications with a 250mm x 250mm transmitted light travel area

The step size of the H112 stage can be as small as 0.1µm, depending on stage and controller configuration. All Prior stages include stages include standard rotary encoders for precision closed loop feedback. Optional linear scales provide precise and exact positioning with repeatability to 0.5µm and accuracy to 3µm. The H112 is manufactured with crossed roller ways, zero backlash recirculating ball screws, X and Y limit switches, and two high precision stepper or servo motors. A flex cable feature allows the stage to move without moving the main stage drive cable. Standard wafer chucks and customized holders are available for any application.

Prior Scientific, 80 Reservoir Park Dr., Rockland, MA 02370-1062. Contact: Sean Condon, 781-878-8442, Fax: 781-878-8736.