Guardian Bare Reticle Stocker (Lithography)

The Guardiantm BRS (Bare Reticle Stocker) is one of PRI's next generation Lithography products. The Guardian BRS is a fully automated reticle storage system, which has the industry's highest storage density per footprint. It has a unique, patent pending design, which provides maximum bare reticle isolation, protection and system security. Various size systems, reticle capacities, and reticle carrier I/O modules are available to accommodate individual fab requirements. The unit also offers improved reliability, reticle delivery cycle-time, serviceability, cost of ownership, and delivery lead-time.

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