GreenDry- IPA Dryer

The GreenDry and GreenDry CI (Chemical Inject) are new IPA Dryers from SCP. Capable of rinsing and drying wafers in a nitrogen purged chamber, the GreenDry provides unmatched process results on both hydrophobic and hydrophilic surfaces.

GreenDry Features:

• Industry's best dryer particle performance:
  
  • 0 particles @ 0.12µ and 0.09µ on hydrophilic wafers
    
  • less than 5 particle adders @ 0.12µ on hydrophobic wafers

• Rinse and dry in one tank in under 10 minutes

• Optimized DI water flow for fast rinse to Rmax

• GreenDry CI features programmable chemical injection system for process flexibility
  
  • HF concentration 100:1 to 1000:1
    
  • HCl concentration 100:1 to 1000:1
    
  • Ozone concentration 5 ppm
  
  
• Low temperature, low volume operating system for IPA

SCP Global Technologies, 400 Benjamin Lane, Boise, ID 83704. Tel: 208-377-9700; Fax: 208-375-4540.