Gencobot 9 Vacuum Robot

The Gencobot 9 Vacuum Robot (GB9) provides accurate, repeatable indexing and transportation of semiconductor wafers in vacuum processing capital equipment down to 10^-8 torr. The robot features the Global Positioning Robot (GPR) system to achieve a high level of performance available in a 300-mm compatible vacuum wafer/FPD handler.

The system is a six degrees of freedom servo controlled robot that can compliantly interact with misaligned cassettes and process modules, as well as deliver deflection compensation during transport. The GB9 is available with various arm options, allowing for the robot to transport an array of wafers, FPDs, and photomasks over an extended radial reach. The standard GB9 is available with vertical stroke options of 3-6 in.

Features:

• Global Positioning Robot technology
• High vacuum compatible (to 10^-8 torr)
• Less than 1 clean room compatible
• Vertical travel up to 6 in., eliminating need for indexers and elevators
• Payload up to 15 kg
• Well suited for large FPD and wafer platen applications
• Full GPR capabilities
• Extended reaches up to 32 in.
• Precise
• Reliable

Genmark, 1213 Elko Dr., Sunnyvale, CA 94089. Tel: 408-745-6520; Fax: 408-745-0635.