GEN2000 Multiwafer Production MBE System
Source: Applied Epi
The GEN2000 Multiwafer Production MBE System is designed specifically for production applications and is able to mass-produce epitaxial wafers (e.g. Gallium Arsenide, GaAs).
The GEN2000 Multiwafer Production MBE System is designed specifically for production applications and is able to mass-produce epitaxial wafers (e.g. Gallium Arsenide, GaAs). The system utilizes a Cluster Tool wafer handling system, a concept widely used throughout the silicon semiconductor industry. The system design reduces per wafer cost by more than 40% compared to currently available systems.
EPI MBE Products Group, 4900 Constellation Dr., St. Paul, MN 55127. Tel: 651-482-0800. Fax: 651-482-0600.
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