Gemini Express Atmospheric Front End Platforms (GX-AFE)
Source: Brooks Automation
Atmospheric Front End platforms are used for direct loading of Process Modules such as Cleaning, APCVD, RTP, ashing etc
Atmospheric Front End platforms are used for direct loading of Process Modules such as Cleaning, APCVD, RTP, ashing etc. They can also be used to load wafers into vacuum load lock modules attached to a vacuum clustertool.
GX-AFE is a simple system with up to 2 load port modules.
Brooks Automation, 15 Elizabeth Drive, Chelmsford, MA 01824. Tel: 978-262-2400; Fax: 978-262-2500.
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