GateKeeper Point-of-use Purifiers
Source: Aeronex, Inc.
POU purifiers offer maximum flow rates from 1 to 60 slpm and integrated particle filtration.
POU purifiers offer maximum flow rates from 1 to 60 slpm and integrated particle filtration. Designed for POU gas purification/filtration at the tool or in the gas box, Aeronex POU purifiers are an economical way to prevent contamination of the process or damage to the tool.
- NH3, H2, O2, CDA, HCl, all Inerts, many other gases purified
- Photolithography
- Compound Semiconductor
- Silicon Semiconductor Processes
Aeronex, Inc., 6975 Flanders Dr., San Diego, CA 92121. Tel: 858-452-0124; Fax: 858-452-0229.
This website uses cookies to ensure you get the best experience on our website. Learn more