GASGUARD Bulk Specialty Gas Systems (BSGS)
The Standard for the Electronics Industry
Air Products is the market leader in manufacturing and supplying Bulk Specialty Gas Systems to the electronics industry. Our systems are the benchmark for the safe and continuous delivery of large specialty gas volumes. Lower costs, improved product quality and consistency, higher reliability, and improved safety are just some of the benefits customers have found.
Systems are available for a wide variety of specialty gases
|
Ammonia |
NH3 |
|
Carbon Dioxide |
CO2 |
|
Carbon Tetrafluoride |
CF4 |
|
Chlorine |
Cl2 |
|
Halocarbon-23 |
CHF3 |
|
Halocarbon-116 |
C2F6 |
|
Helium |
He |
|
Hydrogen Chloride |
HCl |
|
Nitrogen Trifluoride |
NF3 |
|
Nitrous Oxide |
N2O |
Other Fluorocarbons
|
Silane |
SiH4 |
|
Silicon Tetrachloride |
SiCl4 |
|
Sulfur Hexafluoride |
SiF6 |
|
Trichlorosilane |
SiHCl3 |
Typical equipment for BSGS Type I, Type II, and Type III gas delivery systems consists of the product container and High Pressure Control Manifold (HPCM) with monitoring. The HPCM contains all the equipment necessary to filter, regulate, purify, and monitor the process feed.
Bulk supply can be in 500 lb containers; large mobile containers like tube trailers or larger tanks; or stationary, such as a liquid tank.
Our latest development – the Type IV liquid system bulk delivery module – delivers process gases and is designed as a safe, economical, and self-sufficient delivery option for the supply of TCS and SiCl4 into fabs.
Air Products and Chemicals, Inc., 7201 Hamilton Boulevard, Allentown, PA 18195-1501. Tel: 610-481-4911; Fax: 800-880-5204.