Gas Delivery Technology
Source: ATMI
ATMI's VAC – Vacuum Actuated Cylinder, reduces the risks associated with the storage and delivery of hazardous process materials
ATMI– Vacuum Actuated Cylinder, reduces the risks associated with the storage and delivery of hazardous process materials. increased storage capacities resulting in fewer required cylinder changes for enhanced tool uptime;
reduced potential release rates from inadvertent misconnection of the cylinder or accidental damage to process gas piping;
reduced exhaust ventilation power and facility investment;
reduced gas panel maintenance and corrosion damage;
more rapid implementation of new process materials;
The VAC extends the use of sub-atmospheric pressure and reduced super-atmospheric pressure delivery to pyrophoric, corrosive, and other hazardous gases used in CVD and etch processes in the semiconductor industry.
Benefits Include:
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