Gas Delivery Systems

The NovaSource unit offers sub-atmospheric gas delivery systems for the semiconductor industry. These delivery systems are designed for high-density plasma (HDP) chemical vapor deposition (CVD). The sub-atmospheric phosphine (PH3) source enables the integration of HDP-CVD phosphosilicate glass (PSG), a film that is finding use as a pre-metal dielectric for sub-0.25 micron device geometries. The delivery system provides large volumes of PH3 gas with enhanced safety, according to the company. The NovaSource technology uses materials that bind specific gas molecules. This converts high-pressure toxic gases into materials with no pressure.

ATMI, 7 Commerce Dr, Danbury, CT 06810. Phone: (203) 794-1100. Fax: (203) 792-8040.