FSI will Ship Slurry Systems

FSI International, Inc. recently announced that a major U.S. manufacturer of microprocessors placed a $2.3 million order for P4400 slurry blending and distribution systems and related turnkey services. The systems, expected to ship later this month, will support a copper chemical-mechanical polishing process at the customer's European semiconductor manufacturing facility.

FSI P4400 systems blend and distribute oxide, tungsten, copper or polysilicon CMP slurry. The P4400s low-shear design features patented vacuum-pressure technology that delivers slurry to CMP polishers. Vacuum pressure prevents particle agglomeration, which may scratch the wafer and/or settle in the slurry distribution loop, and delivers a consistent, even flow of slurry with constant availability.

FSI International, Inc. is a global supplier of processing equipment.

For more information: Laurie Walker, FSI International. Tel: 612-448-8066.