FSI International Ships 300th Vapor Cleaning System

FSI International, Inc. this week shipped its 300th Excalibur Vapor Cleaning System, which will be delivered to TECH Semiconductor in Singapore. The system will expand post-RIE cleaning applications in the customer's fabs. FSI expects to ship three more two-module Excalibur systems to TECH Semiconductor in fiscal 1998. Those tools will be used to continue the expansion of current Excalibur system applications and for advanced capacitor formation.

Excalibur vapor cleaning systems employ gas vapor, a technology that has evolved over the past ten years to become a leader in performing pre-deposition and post-etch cleaning applications. The tools have capabilities for selective oxide etching, which enables the construction of complex cylindrical and trench capacitors on semiconductor devices.

The FSI Surface Conditioning Division produces automated surface conditioning equipment for processing silicon wafers. In addition to the Excalibur System, the division's products include the ARIES CryoKinetic Cleaning System, which uses inert, frozen gas crystals to clean wafers for defect reduction and yield enhancement; the recently announced ZETA Surface Conditioning System, a fully automated tool that performs a wide variety of submicron cleaning, stripping and etching applications; and MERCURY Surface Conditioning Systems, which also perform cleaning, stripping and etching applications. The division has design and manufacturing facilities in Chaska, Minn.

FSI International; Tel: 612-448-8066.