Fraunhofer-Center Nanoelectronic Technologies Chooses Mattson's Flash-Assisted RTP System

Fremont, CA -- Mattson Technology, Inc. announced that it has received an order for its flash-assisted rapid thermal processing (fRTP) system from the Fraunhofer-Center Nanoelectronic Technologies (CNT). This new millisecond flash annealing system is scheduled to ship in December to the CNT facility in Dresden, Germany, where it will be used for process and performance characterization of critical flash RTP applications.

Nanotechnology is the design and production of chips and other electronic devices with features approaching the size of molecules or atoms. Nanoelectronics is the next step after microelectronics and works with circuits and devices that are smaller than one hundred nanometers, or one ten-millionths of a meter. Beyond being used in computers and communication devices, nanotechnology could be used to build devices, change the properties of materials and make advances in biotechnology.

"The CNT will focus on the industry's technological challenges in its transition to nanoelectronics, enabling chipmakers to overcome significant processing obstacles so they can make further device shrinks," said the director Dr. Peter Kuecher. "We are pleased to cooperate with leading semiconductor equipment manufacturers such as Mattson to develop innovative semiconductor process solutions quickly and efficiently to transfer them directly into the manufacturing environment."

"Chipmakers today are facing the challenge to shrink silicon geometries below 65 nanometers and quickly implement process technology innovations into manufacturing lines," said Stephen T. Lanza, Mattson Technology's Global Business Operations vice president & general manager, Europe and North America. "Our fRTP system has demonstrated the advanced capabilities to address critical sub-65 nanometer applications, and we look forward to working with CNT to develop leading-edge processes for the manufacturing of high-performance transistors for our global customers."

The emerging millisecond anneal market is anticipated to grow at a compound annual growth rate of 57.6 percent over the next five years. Mattson's new fRTP system features a patented arc lamp and flash technology that improves thermal control for millisecond flash-assisted RTP annealing and is expected to meet advanced ultra-shallow junction anneal, improved gate stacks and other enabling process requirements through the 22 nm regime.

SOURCE: Mattson Technology, Inc.