Product/Service

Fluid Dynamics Control and Monitoring Systems

Source: Lucid Treatment Systems, Inc.
Bulk chemical and slurry delivery systems are widely accepted and employed throughout the semiconductor
Lucid Treatment Systems, Inc.al and slurry delivery systems are widely accepted and employed throughout the semiconductor industry, but little has been done to actively control fluid dynamics. With the Clarity line of pressure control and flow monitoring products, process engineers have programmable, reliable and real time control over pressure and flow in bulk delivery loops. These PLC controlled systems provide connectivity and flexibility without being overly complicated or expensive.

The LPCTM controls pressure by regulating the amount of fluid flow leaving a loop and returning to a day tank. A pressure sensor measures distribution loop pressure which is scanned and compared to the loop pressure set point by a PLC controller. The PLC controller responds to pressure fluctuations by altering the position of a high purity control valve resulting in desired loop pressure.

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