Fire-Scope® 2000 - Fine Water Spray System

Since 1996, Securiplex has provided fire protection solutions for the Semiconductor industry. The Securiplex state-of-the-art Fine Water Spray system offers the ideal fire protection for the high technology semiconductor equipment. The use of de-ionized water and nitrogen to create very fine water droplets eliminates the risk of contamination of the process and products, therefore saving thousands of dollars in decontamination and downtime.

The Fine Water Spray system has been proven to extinguish fires in seconds even in the most severe flammable liquid processes. The low pressure and the fine droplets used present no danger of splashing and are safe for personnel.

The low-pressure Fine Water Spray system is installed within the process tools using clean room compatible plastics which reduce the risk of contamination. This approved system can be installed on a variety of semiconductor production equipment such as:

• Open face wet benches
  
• Mini-environments
  
• Plating machines
  
• Spin dryers
  
• Solvent tools
  
• Flammable liquid baths

The Fire-Scope® 2000 provides a fully integrated approach with system monitoring and control of all detection and suppression functions, including direct interface with the FAB Life Safety and tool EMO. A conventional control panel can be supplied for each tool or a single addressable control panel can provide protection for multiple tools within the FAB.

Securiplex Inc., 549 Meloche Avenue, Dorval, PQ H9P 2W2. Tel: 514-633-1000; Fax: 514-633-8338.