Filtration System

N/A Ultrafiltration System treats chemical mechanical polishing (CMP) wastewater. The system concentrates suspended solids up to 400-500 fold, at a design flow rate of 50 gpm. The system processes a mixture of spent slurries from both oxide and metal polishing tools.

Clear, solids-free permeate or filtrate can be reclaimed for a number of applications, such as cooling water. Additional treatment can produce water to mix with incoming water or to use for reverse osmosis make-up. The concentrated slurry is readily flocculated and processed to a dry cake via a filter press.

<%=company%>, 2200 Northern Boulevard, East Hills, NY 11548. Phone: 1-800-360-7255. Fax: (516) 625-3610.