Product/Service

Film Thickness Measurement and Mapping Tool

Source: ADE Corporation
The EpiScan is a high speed film thickness measurement and mapping tool designed for leading edge characterization of advanced, thin epi
ADE Corporation EpiScan is a high speed film thickness measurement and mapping tool designed for leading edge characterization of advanced, thin epi.

Model-based Fourier Transform spectral domain metrology assures accurate data, even in the difficult 2.0 micron - 0.2 micron range. First-principles analysis results in fundamentally accurate measurement of epi thickness, as well as transition layer thickness and substrate carrier concentration.

Features:

  • Edge Exclusion of 1mm
  • Typical Precision of <2nm
  • Full Wafer Mapping
  • No need to Exchange Golden Wafers
  • Inter-laboratory Precision
  • Correlation with SIMS Data

    • <%=company%>, 80 Wilson Way, Westwood, MA 02090-1806. Tel: 781-467-3500. Fax: 781-461-1575.