Film Measurement and Visualization System

AcuMap II is a film measurement and visualization system that provides a powerful, cost-effective alternative to conventional film thickness measurement systems. It is a full-wafer mapper capable of providing up to 40,000 film measurements across a wafer in less than 90 seconds. It is a rugged tool with no moving parts to scan.

The system maps dielectric films, and is compatible with 100-200 mm wafers. The small footprint ensures easy accommodation, while the high-speed whole wafer mapping system employs a unique optical imaging system that provides high-density resolution of wafer thickness and permits process characterization of the entire wafer. This visualization is ideal for new equipment or process characterization, development and optimization in disciplines such as CMP, Etch, and CVD.

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