FE III Ellipsometer
Source: Rudolph Technologies
FE III uses the Focus film metrology system that handles applications in semiconductor fabrication
Rudolph Technologiesuses the Focus film metrology system that handles applications in semiconductor fabrication. The technology focused beam system in this product directly measures the sample with a small spot at multiple angles of incidence and at multiple wavelengths. This defines more variables and gives this product the full-fab capabilities of multi-technique systems without their complexity and potentially ambiguous results. This product features a long life HeNe laser that provides high signal-to-noise for repeatability and the stability and wavelength accuracy of an atomic transition.
<%=company%>, One Rudolph Road, Flanders, NJ 07836. Phone: (973) 691-1300. Fax: (973) 691-5480.