Product/Service

FCE-2500/2700/3800 System

Source: Temescal, BOC Coating Technology
The FCE-2500 system is available either freestanding or in a clean-room-compatible, through-the-wall configuration
The FCE-2500 system is available either freestanding or in a clean-room-compatible, through-the-wall configuration. To optimize through-the-wall applications, both the load lock and the source tray are accessible from either the clean room or the service area.
  • Accommodates multiple electron beam and resistance-heated sources
  • Compatible with lift-off and variable angle processes
  • Ion milling and substrate heat options available
Manual or fully automatic operation with the Temescal PC/PLC Control System

Temescal, BOC Coating Technology, 2700 Maxwell Way, P.O. Box 2529, Fairfield, CA 94533-0252. Tel: 707-423-2100; Fax: 707-425-1706.