FC-1800 System
Source: Temescal, BOC Coating Technology
The load-lock design of the FC-1800 system ensures fast-cycle production in high-throughput evaporation processes
The load-lock design of the FC-1800 system ensures fast-cycle production in high-throughput evaporation processes. The vacuum-isolated lower chamber reduces pumpdown time per cycle and minimizes source and substrate heater contamination. The low-profile bell jar design is convenient for substrate loading and for enclosure by a laminar-flow hood.
- 20-inch (508 mm) diameter product chamber
- Multiple material deposition
- Substrate fixturing for lift-off and other process applications
- Cryopump standard; diffusion pump and turbopump also available
- lon milling, glow discharge and substrate heat
- Temescal PC/PLC Control System (optional)
Temescal, BOC Coating Technology, 2700 Maxwell Way, P.O. Box 2529, Fairfield, CA 94533-0252. Tel: 707-423-2100; Fax: 707-425-1706.
This website uses cookies to ensure you get the best experience on our website. Learn more