Factory Integration Tester
The FIT300 offers valuable time savings by first verifying that production equipment performs proper E84 handshaking to automated material handling systems (AMHS) before the equipment is shipped or installed and can test AMHS systems for proper hand-off without requiring the presence of the expensive production equipment. Reducing the need for production equipment to be dedicated to testing is a significant driver when capital-intensive 300mm factories start gearing up to production levels.
I300I/J300 Global Joint Guidelines require all 300mm semiconductor equipment to provide an E84 Parallel Interface used for handshaking with AMHS and a Semiconductor Equipment Communications Standard (SECS) and SEMI Generic Equipment Model Standard (GEM) interface for SECS communications. The FIT300 is designed to test these related interfaces.
The FIT300 combines E84 capabilities, E23 protocol for legacy systems and SECSIM Pro functionality. It can be used to test, independently or together, the parallel interface and the SECS interface. It can also perform safety tests, making sure there are no AMHS transfers when equipment is switched into manual mode. For all tests, both a real-time cathode ray tube (CRT) display and a disk log are provided.
Automated scripts run parallel interface protocol sequences quickly and correctly with minimum operator interaction and automated error checking. Pre-written E84 test scripts are provided; customized scripts using the company's SSL script language are also available. FIT300 includes a hardware component that provides standard E84 signals and attaches to the parallel printer port of any PC running Microsoft Windows and the company's SECSIM Pro software.
GW Associates, Inc., 1183 Bordeaux Dr., Suite 27, Sunnyvale, CA 94089. Tel: 408-745-1844.