Product/Service

Fab Efficiency Technologies

Source: Applied Materials, Inc.
Applied Materials, Inc. has announced Factory Efficiency Technologies (FET) that leverage the company's strengths in process equipment, defect detection and process control software to enable higher yields and greater fab efficiencies with its systems
Applied Materials, Inc.erials, Inc. has announced Factory Efficiency Technologies (FET) that leverage the company's strengths in process equipment, defect detection and process control software to enable higher yields and greater fab efficiencies with its systems.

The new SmartSys software application collects data from the tool's multiple sensors to continuously monitor the system's health and its process. Powered by an integration of multivariate equipment health monitoring technology, the software can automatically schedule maintenance and provide service personnel with detailed information about a fault or pre-fault condition.

The Defect Source Identification (DSI) package operates in conjunction with particle and other defect inspection tools to correlate defects found on a wafer with their process tool source and suggest corrective action. Using a Defect Knowledge Library (DKL) and image analysis capability, the DSI enables operators to find the root cause of defects and indicates corrective action.

Applied Materials, Inc.erials has offered integrated metrology for thickness measurement of dielectric films on its Mirra Mesa CMP and Producer systems. The company now expands its in-line inspection capabilities for several of its systems with its Integrated Particle Monitor (IPM).

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